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Plasma cleaning machine YSP600U/2KU
Plasma cleaning machine YSP600U/2KU
Product details
The sample transmission system is modular, making it easy to combine
purpose
● Improve the adhesion and surface modification of various materials
● Clean various substrates.
Surface modification of electronic components and materials.
Remove organic matter and natural oxide films.
characteristic
● Small size, saving space.
Choose a small chamber with high reaction efficiency.
● It is easier to embed into production lines for use.
● Plasma mode can be freely switched through the operation panel.
Equipped with a cooling reaction table.
Inner groove
technical specifications
purpose
● Improve the adhesion and surface modification of various materials
● Clean various substrates.
Surface modification of electronic components and materials.
Remove organic matter and natural oxide films.
characteristic
● Small size, saving space.
Choose a small chamber with high reaction efficiency.
● It is easier to embed into production lines for use.
● Plasma mode can be freely switched through the operation panel.
Equipped with a cooling reaction table.
Inner groove
technical specifications
|
model |
YSP600U |
YSP2KU |
|
pattern |
RIE (DP mode selection) |
|
|
High frequency transmission power |
600W |
2000W |
|
Reaction table size |
W300×D300mm |
W600×D600mm |
|
Reactive gas |
2 intake system (oxygen, argon) |
|
|
Reaction gas flow control |
Mass flow controller |
|
|
Gas inlet |
2 reaction gases, 1 filling gas, and 1 air |
|
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